Microscopic interferometer for surface roughness measurement

Zhihua Ding; Guiying Wang; ZhiJiang Wang

doi:10.1117/1.600979

1 October 1996 Microscopic interferometer for surface roughness measurement

Zhihua Ding, Guiying Wang, ZhiJiang Wang

Optical Engineering, Vol. 35, Issue 10, (October 1996). https://doi.org/10.1117/1.600979

We describe a phase-shifting microscopic Mirau interferometer for measurement of surface roughness in which feedback control is implemented for shifter asymptotic adjustment. The actual height resolution of our instrument is of ~0.3 nm with a measurement accuracy of 0.5 nm. Comments on interferometer design, experimental examples, and error analysis are also given.

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Zhihua Ding, Guiying Wang, and ZhiJiang Wang "Microscopic interferometer for surface roughness measurement," Optical Engineering 35(10), (1 October 1996). https://doi.org/10.1117/1.600979

Published: 1 October 1996

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