Modern trends in microstructures and integrated optics for communication, sensing, and actuation

Massood Tabib-Azar; Glenn Beheim

doi:10.1117/1.601331

1 May 1997 Modern trends in microstructures and integrated optics for communication, sensing, and actuation

Massood Tabib-Azar, Glenn Beheim

Optical Engineering, Vol. 36, Issue 5, (May 1997). https://doi.org/10.1117/1.601331

Recent progress in micro-opto-electro-mechanical systems (MOEMSs) has enabled the realization of a variety of novel devices, which, because of their small size and low cost, have the potential to revolutionize the fields of communication, sensing, and actuation. These micro-optical devices can be classified as either free-space optical or guided-wave in nature, and here we focus on the latter. We review the research on this subject and discuss results from our own research. We also identify technology bottlenecks and discuss the recent trends in this dynamic field.

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Massood Tabib-Azar and Glenn Beheim "Modern trends in microstructures and integrated optics for communication, sensing, and actuation," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601331

Published: 1 May 1997

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