Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite filters prepared by reactive ion-assisted codeposition

Rung-Ywan Tsai; Sen Chrong Shiau; Fang Chung Ho; Mu-Yi Hua

doi:10.1117/1.601762

1 September 1998 Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite filters prepared by reactive ion-assisted codeposition

Rung-Ywan Tsai, Sen Chrong Shiau, Fang Chung Ho, Mu-Yi Hua

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Optical Engineering, Vol. 37, Issue 9, (September 1998). https://doi.org/10.1117/1.601762

The influences of TiO2 contents on the structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite films prepared by reactive ion-assisted codeposition are systematically investigated. The CaF2 films deposited at an ambient substrate temperature are found to have superior optical, mechanical, and moisture resistant properties with the addition of 10 at. % TiO2. The structure of this film changes from polycrystalline CaF2 to a mixed phase of amorphous TiO2 and polycrystalline CaF2. The hardness of composite films containing 45 at. % TiO2 is even higher than that of pure TiO2 and glass, which is attributed to the isolation of the crystalline CaF2 grains by the interconnection of the amorphous TiO2 dispersoids.

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Rung-Ywan Tsai, Sen Chrong Shiau, Fang Chung Ho, and Mu-Yi Hua "Composition-dependent structural, optical, mechanical, and moisture resistant properties of CaF2-TiO2 composite filters prepared by reactive ion-assisted codeposition," Optical Engineering 37(9), (1 September 1998). https://doi.org/10.1117/1.601762

Published: 1 September 1998

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