300-mm-aperture phase-shifting Fizeau interferometer

Philip S. Fairman; B. K. Ward; Bozenko F. Oreb; David I. Farrant; Yves A. Gilliand; Christopher H. Freund; Achim J. Leistner; Jeffrey A. Seckold; Christopher J. Walsh

doi:10.1117/1.602180

1 August 1999 300-mm-aperture phase-shifting Fizeau interferometer

Philip S. Fairman, B. K. Ward, Bozenko F. Oreb, David I. Farrant, Yves A. Gilliand, Christopher H. Freund, Achim J. Leistner, Jeffrey A. Seckold, Christopher J. Walsh

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Optical Engineering, Vol. 38, Issue 8, (August 1999). https://doi.org/10.1117/1.602180

A 300-mm-aperture digital phase-shifting Fizeau interferometer (LADI) has been developed in house for precision metrology of optical components fabricated by the Optical Workshop at CSIRO Division of Telecommunications and Industrial Physics. This paper describes the optical and mechanical configuration of the instrument as well as its calibration and performance characteristics. Recent measurements on 250-mm-diam uncoated optical surfaces have consistently shown shortterm repeatability of 0.3 nm rms from measurement to measurement and allowed absolute characterization of these surfaces to an accuracy of a few nanometers.

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Philip S. Fairman, B. K. Ward, Bozenko F. Oreb, David I. Farrant, Yves A. Gilliand, Christopher H. Freund, Achim J. Leistner, Jeffrey A. Seckold, and Christopher J. Walsh "300-mm-aperture phase-shifting Fizeau interferometer," Optical Engineering 38(8), (1 August 1999). https://doi.org/10.1117/1.602180

Published: 1 August 1999

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