1 April 2000 Three channel phase-shifting interferometer using polarization-optics and a diffraction grating
Andrea Hettwer, Jochen Kranz, Johannes Schwider
Author Affiliations +
A modified Michelson interferometer is described by which three, by - ?/2, 0 and + ?/2 phase-shifted interferograms can be taken simultaneously by a single CCD camera using a binary diffraction grating and polarization optics. Hence measurements of dynamic events and in adverse conditions are possible. The experimental setup, first results and a mathematical error analysis are presented.
Andrea Hettwer, Jochen Kranz, and Johannes Schwider "Three channel phase-shifting interferometer using polarization-optics and a diffraction grating," Optical Engineering 39(4), (1 April 2000). https://doi.org/10.1117/1.602453
Published: 1 April 2000
Lens.org Logo
CITATIONS
Cited by 82 scholarly publications and 13 patents.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Phase shifts

Diffraction gratings

Interferometers

Cameras

Etching

Polarization

Error analysis

RELATED CONTENT


Back to Top