Radial shearing interferometer for in-process measurement of diamond turning

Tsuguo Kohno; Daiji Matsumoto; Takanori Yazawa; Yutaka Uda

doi:10.1117/1.1290463

1 October 2000 Radial shearing interferometer for in-process measurement of diamond turning

Tsuguo Kohno, Daiji Matsumoto, Takanori Yazawa, Yutaka Uda

Optical Engineering, Vol. 39, Issue 10, (October 2000). https://doi.org/10.1117/1.1290463

A stable interferometer with two zone plates to measure a concave mirror figure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test is referred to that from the central part. On-machine experiments show that the interferometer is stable and compact enough to be applicable to in-process measurement for diamond turning at about 0.06 ?m p-v accuracy.

Citation Download Citation

Tsuguo Kohno, Daiji Matsumoto, Takanori Yazawa, and Yutaka Uda "Radial shearing interferometer for in-process measurement of diamond turning," Optical Engineering 39(10), (1 October 2000). https://doi.org/10.1117/1.1290463

Published: 1 October 2000

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available