1 October 2000 Theory and practice of elliptically bent x-ray mirrors
Malcolm R. Howells, Daniela Cambie, Steven C. Irick, Alastair A. MacDowell, Howard A. Padmore, Timothy R. Renner, Seung Yu Rah, Reuben Sandler
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We report the results of our research and development in techniques for producing elliptical x-ray mirrors by controlled bending of a flat substrate. We review the theory and technique of mirror bending with emphasis on the optical engineering issues and describe our design concepts for both metal and ceramic mirrors. We provide analysis of the various classes of error that must be addressed to obtain a high quality elliptical surface and a correspondingly fine focus of the x-ray beam. We describe particular mirrors that have been built, using these techniques, to meet the requirements of the scientific program at the Advanced Light Source at Lawrence Berkeley National Laboratory. For these examples, we show optical metrology results indicating the achievement of surface accuracy values around and, in some cases, below 1 ?rad as well as x-ray measurements showing submicrometer focal spots.
Malcolm R. Howells, Daniela Cambie, Steven C. Irick, Alastair A. MacDowell, Howard A. Padmore, Timothy R. Renner, Seung Yu Rah, and Reuben Sandler "Theory and practice of elliptically bent x-ray mirrors," Optical Engineering 39(10), (1 October 2000). https://doi.org/10.1117/1.1289879
Published: 1 October 2000
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Cited by 84 scholarly publications and 1 patent.
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KEYWORDS
Mirrors

X-rays

Monochromatic aberrations

Error analysis

Metals

Optical engineering

Distortion

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