Simple fabrication of cylindrical sol-gel microlens array by reflowing technique

Miao He; Xiaocong Yuan; Nam Quoc Ngo; Wai Chye Cheong; Jing Bu

doi:10.1117/1.1591195

1 August 2003 Simple fabrication of cylindrical sol-gel microlens array by reflowing technique

Miao He, Xiaocong Yuan, Nam Quoc Ngo, Wai Chye Cheong, Jing Bu

Optical Engineering, Vol. 42, Issue 8, (August 2003). https://doi.org/10.1117/1.1591195

In this paper, we report the fabrication of a 128-×1024-element cylindrical microlens array in a low-cost inorganic-organic SiO₂/ZrO₂ sol-gel glass using reflowing technique. The fabricated microlens array had excellent surface smoothness and dimension uniformity. The prime advantages of the hybrid sol-gel material are its suitability as an etching-free negative-tone UV-sensitive material, uniformity, and other excellent optical properties. Microfabrication in sol-gel glass using the reflowing technique is demonstrated as a cost-effective and high-volume production technology for micro-optical elements.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Miao He, Xiaocong Yuan, Nam Quoc Ngo, Wai Chye Cheong, and Jing Bu "Simple fabrication of cylindrical sol-gel microlens array by reflowing technique," Optical Engineering 42(8), (1 August 2003). https://doi.org/10.1117/1.1591195

Published: 1 August 2003

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