Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry

Xianyu Su; Wanzhong Song; Yiping Cao; Liqun Xiang

doi:10.1117/1.1646178

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1 March 2004 Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry

Xianyu Su, Wanzhong Song, Yiping Cao, Liqun Xiang

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Optical Engineering, 43(3), (2004). https://doi.org/10.1117/1.1646178

A new method for both the phase-height mapping and the 3-D coordinate calibration in phase-measuring profilometry (PMP) is presented. A calibration gauge containing four virtual calibration planes is designed. The application of the calibration gauge avoids the translation of the standard plane during the calibration process. Furthermore, circular steps are designed to calibrate lateral coordinates automatically. With this calibration gauge, both the phase-height mapping and lateral coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover a continuous phase distribution of all the steps with the same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Xianyu Su, Wanzhong Song, Yiping Cao, and Liqun Xiang "Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry," Optical Engineering 43(3), (1 March 2004). https://doi.org/10.1117/1.1646178

Published: 1 March 2004

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