Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern

Jinhuan Li; Osami Sasaki; Takamasa Suzuki

doi:10.1117/1.2166848

1 February 2006 Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern

Jinhuan Li, Osami Sasaki, Takamasa Suzuki

Author Affiliations +

Optical Engineering, Vol. 45, Issue 2, 023601 (February 2006). https://doi.org/10.1117/1.2166848

Abstract

A method is proposed for accurately measuring a sectional profile of a metal cylinder. In this method a sinusoidally vibrating sinusoidal interference pattern is used to generate an exact spatial scale along one direction. Light from top points of a metal cylinder surface is extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the metal cylinder is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jinhuan Li, Osami Sasaki, and Takamasa Suzuki "Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern," Optical Engineering 45(2), 023601 (1 February 2006). https://doi.org/10.1117/1.2166848

Published: 1 February 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available