Characterization of a self-mixing displacement sensor under moderate feedback

Caroline Bès; Thierry M. Bosch; Guy Plantier; Francis Bony

doi:10.1117/1.2337575

1 August 2006 Characterization of a self-mixing displacement sensor under moderate feedback

Caroline Bès, Thierry M. Bosch, Guy Plantier, Francis Bony

Author Affiliations +

Optical Engineering, Vol. 45, Issue 8, 084402 (August 2006). https://doi.org/10.1117/1.2337575

Abstract

A displacement sensor enabling us to perform measurements under moderate feedback has been designed with a resolution up to 40 nm. Its performance can be optimized by using the wavelet transform when the signal is disturbed by electromagnetic fields, mechanical coupling, or speckle effect. By determining the repeatability and the reproducibility of this sensor, we have also demonstrated that this measuring device is suitable for statistical process control when an interval of tolerance of ±300 nm is required.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Caroline Bès, Thierry M. Bosch, Guy Plantier, and Francis Bony "Characterization of a self-mixing displacement sensor under moderate feedback," Optical Engineering 45(8), 084402 (1 August 2006). https://doi.org/10.1117/1.2337575

Published: 1 August 2006

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