Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups

Chien-Chung Lee; Yi Chiu; Han-Ping David Shieh

doi:10.1117/1.2769362

1 August 2007 Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups

Chien-Chung Lee, Yi Chiu, Han-Ping David Shieh

Author Affiliations +

Optical Engineering, Vol. 46, Issue 8, 084601 (August 2007). https://doi.org/10.1117/1.2769362

Abstract

A pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chien-Chung Lee, Yi Chiu, and Han-Ping David Shieh "Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups," Optical Engineering 46(8), 084601 (1 August 2007). https://doi.org/10.1117/1.2769362

Published: 1 August 2007

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $24.00

Non-members: $28.00 ADD TO CART

JOURNAL ARTICLE
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Diffraction

Silicon

Etching

Polarization

Diffraction gratings

Reflectivity

Beam splitters

Show All Keywords

Keywords/Phrases

Search In:

Publication Years