Three-flat tests including mounting-induced deformations

Ulf Griesmann; Quandou Wang; Johannes Soons

doi:10.1117/1.2784531

1 September 2007 Three-flat tests including mounting-induced deformations

Ulf Griesmann, Quandou Wang, Johannes Soons

Author Affiliations +

Optical Engineering, Vol. 46, Issue 9, 093601 (September 2007). https://doi.org/10.1117/1.2784531

Abstract

We investigate three-flat calibration methods based on rotational symmetry and mirror symmetry for absolute interferometric flatness measurements of circular flats in the presence of deformations caused by the support mechanism for the flats, which are a significant problem for large, heavy flats. We show that the mirror-symmetric component of the mounting-induced deformation can be determined by comparing flat test solutions based on mirror symmetry and on rotational symmetry, when the flats have identical deformations. We also describe a novel solution to the three-flat problem for three flats with identical mounting-induced deformations. In the new three-flat solution, the flat deformation is calculated along with the wavefront flatness errors for the three flats. Formulas for the uncertainty of three-flat test solutions are derived.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ulf Griesmann, Quandou Wang, and Johannes Soons "Three-flat tests including mounting-induced deformations," Optical Engineering 46(9), 093601 (1 September 2007). https://doi.org/10.1117/1.2784531

Published: 1 September 2007

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