Frequency analysis of maskless lithography system for generation of continuous phase patterns with homogeneous structure depth

Carsten Glasenapp; Hans Zappe

doi:10.1117/1.2870103

1 February 2008 Frequency analysis of maskless lithography system for generation of continuous phase patterns with homogeneous structure depth

Carsten Glasenapp, Hans Zappe

Author Affiliations +

Optical Engineering, Vol. 47, Issue 2, 023002 (February 2008). https://doi.org/10.1117/1.2870103

Abstract

A new approach for the fabrication of continuous-relief diffractive phase patterns is presented. The approach is based on a maskless lithography system with reflective liquid crystal displays that is able to expose continuous and binary reliefs in photoresist with a resolution of 3.4 μm. Due to a spatial frequency analysis of the entire exposure system, a compensation transformation may be applied to the input data, which results in constant structure depths independent of spatial frequencies.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Carsten Glasenapp and Hans Zappe "Frequency analysis of maskless lithography system for generation of continuous phase patterns with homogeneous structure depth," Optical Engineering 47(2), 023002 (1 February 2008). https://doi.org/10.1117/1.2870103

Published: 1 February 2008

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