Measurement of the vibrating shape of a bimorph deformable mirror using a laser displacement sensor

Shin Oya

doi:10.1117/1.3095904

1 March 2009 Measurement of the vibrating shape of a bimorph deformable mirror using a laser displacement sensor

Shin Oya

Author Affiliations +

Optical Engineering, Vol. 48, Issue 3, 033601 (March 2009). https://doi.org/10.1117/1.3095904

Abstract

A method to characterize the vibrating shape of a bimorph deformable mirror by measurement using a laser displacement sensor is presented. The displacement of the deformable mirror surface at a point is recorded as a frequency response function. The surface profile is synthesized from the response functions obtained at multiple points on a deformable mirror by postprocessing. The method has a wide frequency range and high-frequency resolution, suitable to investigate the resonance behavior of a deformable mirror. Although the spatial resolution is low compared with an interferometer, it is sufficient to identify low-spatial-order shapes at resonance frequencies. The accuracy of the displacement measurement is estimated to be comparable with interferometric data.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Shin Oya "Measurement of the vibrating shape of a bimorph deformable mirror using a laser displacement sensor," Optical Engineering 48(3), 033601 (1 March 2009). https://doi.org/10.1117/1.3095904

Published: 1 March 2009

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available