Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements

Peng Su; Robert E. Parks; Yuhao Wang; Chang Jin Oh; James H. Burge

doi:10.1117/1.OE.51.4.043604

6 April 2012 Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements

Peng Su, Robert E. Parks, Yuhao Wang, Chang Jin Oh, James H. Burge

Author Affiliations +

Optical Engineering, Vol. 51, Issue 4, 043604 (April 2012). https://doi.org/10.1117/1.OE.51.4.043604

Abstract

The swing-arm optical coordinate measuring machine (SOC), a profilometer with a distance-measuring interferometric probe for in situ measurement of the topography of aspheric surfaces,has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe, self-calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from modal estimation of the sheared signal.

Citation Download Citation

Peng Su, Robert E. Parks, Yuhao Wang, Chang Jin Oh, and James H. Burge "Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements," Optical Engineering 51(4), 043604 (6 April 2012). https://doi.org/10.1117/1.OE.51.4.043604

Published: 6 April 2012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available