Calibration of absolute planarity flats: generalized iterative approach

Maurizio M. Vannoni; Andrea Sordini; Giuseppe Molesini

doi:10.1117/1.OE.51.8.081510

21 May 2012 Calibration of absolute planarity flats: generalized iterative approach

Maurizio M. Vannoni, Andrea Sordini, Giuseppe Molesini

Author Affiliations +

Optical Engineering, Vol. 51, Issue 8, 081510 (May 2012). https://doi.org/10.1117/1.OE.51.8.081510

Abstract

Absolute planarity measurement with interferometric data and iterative surface recovering approaches is briefly reviewed. Extension to the case of multiple measurements is outlined, and demonstration with synthetic data is provided. A generalized approach is finally presented, making use of operators representing the manipulations occurred with the surfaces taking part in the generation of the interferograms. The potential advantages of the new interferogram processing technique are pointed out.

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Maurizio M. Vannoni, Andrea Sordini, and Giuseppe Molesini "Calibration of absolute planarity flats: generalized iterative approach," Optical Engineering 51(8), 081510 (21 May 2012). https://doi.org/10.1117/1.OE.51.8.081510

Published: 21 May 2012

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