Combination of guided mode and photometric optical metrology methods for precise determination of refractive index dispersion: application to polymer blend and ceramic thin films for gas sensors

Thomas M. Wood; Judikaël Le Rouzo; François R. Flory; Paul Coudray; Valmor R. Mastelaro; Pedro Pelissari; Sérgio C. Zilio

doi:10.1117/1.OE.52.9.094104

10 September 2013 Combination of guided mode and photometric optical metrology methods for precise determination of refractive index dispersion: application to polymer blend and ceramic thin films for gas sensors

Thomas M. Wood, Judikaël Le Rouzo, François R. Flory, Paul Coudray, Valmor R. Mastelaro, Pedro Pelissari, Sérgio C. Zilio

Author Affiliations +

Optical Engineering, Vol. 52, Issue 9, 094104 (September 2013). https://doi.org/10.1117/1.OE.52.9.094104

Abstract

Two optical techniques, m-lines and spectroscopic ellipsometry, are compared for their suitability for obtaining the wavelength and the temperature dispersion of the refractive index of thin-film layers used in gas detector devices. Two types of materials that are often integrated into gas sensors are studied: a polymer organic–inorganic blend deposited by spin coating typically used in near-infrared waveguides and the ceramic semiconductor SrTi _1−xFe _xO ₃ (strontium titanate) doped with iron at concentrations x=0.075 and 0.1 deposited by electron beam deposition. The refractive index dispersion obtained by m-lines and ellipsometry is compared, and the differences between the measured parameters for the two materials are discussed. The chromatic dispersion will be represented by a three-term Cauchy law. An intuitive method for verifying the measured indices using an integrating sphere and reflexion coefficient modeling techniques are also demonstrated. Thermo-optic coefficients in the order of −1×10⁻⁴ /K for both materials are reported, and very low chromatic dispersions are also measured, thanks to the high sensitivity of the m-lines technique. The uniaxial anisotropic properties of the polymer-blend films are measured and discussed in the case of the semiconductor films.

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Thomas M. Wood, Judikaël Le Rouzo, François R. Flory, Paul Coudray, Valmor R. Mastelaro, Pedro Pelissari, and Sérgio C. Zilio "Combination of guided mode and photometric optical metrology methods for precise determination of refractive index dispersion: application to polymer blend and ceramic thin films for gas sensors," Optical Engineering 52(9), 094104 (10 September 2013). https://doi.org/10.1117/1.OE.52.9.094104

Published: 10 September 2013

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