Toward superfast three-dimensional optical metrology with digital micromirror device platforms

Tyler Bell; Song Zhang

doi:10.1117/1.OE.53.11.112206

1 April 2014 Toward superfast three-dimensional optical metrology with digital micromirror device platforms

Tyler Bell, Song Zhang

Author Affiliations +

Optical Engineering, Vol. 53, Issue 11, 112206 (April 2014). https://doi.org/10.1117/1.OE.53.11.112206

Abstract

Decade-long research efforts toward superfast three-dimensional (3-D) shape measurement leveraging the digital micromirror device (DMD) platforms are summarized. Specifically, we will present the following technologies: (1) high-resolution real-time 3-D shape measurement technology that achieves 30 Hz simultaneous 3-D shape acquisition, reconstruction, and display with more than 300,000 points per frame; (2) superfast 3-D optical metrology technology that achieves 3-D measurement at a rate of tens of kilohertz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3-D optical metrology using the DMD platforms. Both principles and experimental results are presented.

Citation Download Citation

Tyler Bell and Song Zhang "Toward superfast three-dimensional optical metrology with digital micromirror device platforms," Optical Engineering 53(11), 112206 (1 April 2014). https://doi.org/10.1117/1.OE.53.11.112206

Published: 1 April 2014

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