Laser heterodyne interferometer for the simultaneous measurement of displacement and angle using a single reference retroreflector

Shijie Zhao; Haoyun Wei; Yan Li

doi:10.1117/1.OE.54.8.084112

28 August 2015 Laser heterodyne interferometer for the simultaneous measurement of displacement and angle using a single reference retroreflector

Shijie Zhao, Haoyun Wei, Yan Li

Author Affiliations +

Optical Engineering, Vol. 54, Issue 8, 084112 (August 2015). https://doi.org/10.1117/1.OE.54.8.084112

Abstract

This paper describes the design and realization of a new type of heterodyne interferometer for simultaneously measuring displacement and angle using only one reference retroreflector. Theoretically, this interferometer has better angle accuracy compared with classical systems that employ two reference retroreflectors because it can avoid the relative displacement resulting from external factors. The optical and mechanical configurations of the proposed interferometer, which consists of a frequency-stabilized dual-frequency laser, a monolithic prism, and additional optical and electronic components, are designed and finely processed. The experimental results show that the angle accuracy of the interferometer is greater than ±0.15 arcsec in comparison with an autocollimator.

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Shijie Zhao, Haoyun Wei, and Yan Li "Laser heterodyne interferometer for the simultaneous measurement of displacement and angle using a single reference retroreflector," Optical Engineering 54(8), 084112 (28 August 2015). https://doi.org/10.1117/1.OE.54.8.084112

Published: 28 August 2015

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