Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region

Antonela Comisso; Marco Nardello; Angelo Giglia; Piergiorgio Nicolosi

doi:10.1117/1.OE.55.9.095102

14 September 2016 Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region

Antonela Comisso, Marco Nardello, Angelo Giglia, Piergiorgio Nicolosi

Author Affiliations +

Optical Engineering, Vol. 55, Issue 9, 095102 (September 2016). https://doi.org/10.1117/1.OE.55.9.095102

Abstract

The optical constants of titanium dioxide (TiO₂) have been experimentally determined at energies in the extreme ultraviolet and soft x-ray spectral regions, from 25.5 to 612 eV. Measuring angle-dependent reflectance of amorphous TiO₂ thin films with synchrotron radiation at the BEAR beamline of Synchrotron ELETTRA. The experimental reflectivity profiles were fitted to the Fresnel equations using a genetic algorithm applied to a least-square curve fitting method, obtaining values for δ and β. We compared our measurements with tabulated data. All samples were grown on Si (100) substrates by the electron-beam evaporation technique, with a substrate temperature of 150°C and deposition rates of 0.3 to 0.5 Å/s. Complete films characterization have been carried out with structural (XRD, ellipsometry, and profilometry), compositional (x-ray photoelectron spectroscopy), and morphological (atomic force microscopy) analyses.

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Antonela Comisso, Marco Nardello, Angelo Giglia, and Piergiorgio Nicolosi "Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region," Optical Engineering 55(9), 095102 (14 September 2016). https://doi.org/10.1117/1.OE.55.9.095102

Published: 14 September 2016

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