Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning

Meiping Zhu; Huanbin Xing; Yingjie Chai; Kui Yi; Jian Sun; Jianguo Wang; Jianda Shao

doi:10.1117/1.OE.56.1.011003

11 July 2016 Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning

Meiping Zhu, Huanbin Xing, Yingjie Chai, Kui Yi, Jian Sun, Jianguo Wang, Jianda Shao

Author Affiliations +

Optical Engineering, Vol. 56, Issue 1, 011003 (July 2016). https://doi.org/10.1117/1.OE.56.1.011003

Abstract

BK7 glass substrates were precleaned by different cleaning procedures before being loaded into a vacuum chamber, and then a series of plasma ion cleaning procedures were conducted at different bias voltages in the vacuum chamber, prior to the deposition of 532-nm antireflection (AR) coatings. The plasma ion cleaning process was implemented by the plasma ion bombardment from an advanced plasma source. The surface morphology of the plasma ion-cleaned substrate, as well as the laser-induced damage threshold (LIDT) of the 532-nm AR coating was investigated. The results indicated that the LIDT of 532-nm AR coating can be greatly influenced by the plasma ion cleaning energy. The plasma ion cleaning with lower energy is an attractive method to improve the LIDT of the 532-nm AR coating, due to the removal of the adsorbed contaminations on the substrate surface, as well as the removal of part of the chemical impurities hidden in the surface layer.

Citation Download Citation

Meiping Zhu, Huanbin Xing, Yingjie Chai, Kui Yi, Jian Sun, Jianguo Wang, and Jianda Shao "Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning," Optical Engineering 56(1), 011003 (11 July 2016). https://doi.org/10.1117/1.OE.56.1.011003

Published: 11 July 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available