LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

Muhammet Poyraz; Kazim Gorgulu; Zulkarneyn Sisman; Mahmud Yusuf Tanrikulu; Ali Kemal Okyay

doi:10.1117/1.OE.56.3.037106

15 March 2017 LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

Muhammet Poyraz, Kazim Gorgulu, Zulkarneyn Sisman, Mahmud Yusuf Tanrikulu, Ali Kemal Okyay

Author Affiliations +

Optical Engineering, Vol. 56, Issue 3, 037106 (March 2017). https://doi.org/10.1117/1.OE.56.3.037106

Abstract

We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations.

Citation Download Citation

Muhammet Poyraz, Kazim Gorgulu, Zulkarneyn Sisman, Mahmud Yusuf Tanrikulu, and Ali Kemal Okyay "LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging," Optical Engineering 56(3), 037106 (15 March 2017). https://doi.org/10.1117/1.OE.56.3.037106

Received: 14 November 2016; Accepted: 2 March 2017; Published: 15 March 2017

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available