Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip

Ning Zhao; Guang Qian; Xing-Chang Fu; Li-Jiang Zhang; Wei Hu; Ruo-Zhou Li; Tong Zhang

doi:10.1117/1.OE.56.2.027109

24 February 2017 Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip

Ning Zhao, Guang Qian, Xing-Chang Fu, Li-Jiang Zhang, Wei Hu, Ruo-Zhou Li, Tong Zhang

Author Affiliations +

Optical Engineering, Vol. 56, Issue 2, 027109 (February 2017). https://doi.org/10.1117/1.OE.56.2.027109

Abstract

Displacement sensor is one of the most important measuring instruments in many automated systems. We demonstrated an integrated optical displacement sensor based on an asymmetric Mach–Zehnder interferometer chip on a flexible substrate. The sensing chip was made of polymer materials and fabricated by lithography and lift-off techniques. Measured results show that the device has a loss of less than 5 dB and a potential sensitivity of about 0.105 rad/μm with quite a large space for promotion. The sensor has advantages of antielectromagnetic interference, high reliability and stability, simple preparing process, and low cost; it will occupy an important place in displacement sensors.

Citation Download Citation

Ning Zhao, Guang Qian, Xing-Chang Fu, Li-Jiang Zhang, Wei Hu, Ruo-Zhou Li, and Tong Zhang "Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip," Optical Engineering 56(2), 027109 (24 February 2017). https://doi.org/10.1117/1.OE.56.2.027109

Received: 27 October 2016; Accepted: 6 February 2017; Published: 24 February 2017

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