LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

Muhammet Poyraz; Kazim Gorgulu; Zulkarneyn Sisman; Mahmud Yusuf Tanrikulu; Ali Kemal Okyay

doi:10.1117/1.OE.56.3.037106

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15 March 2017 LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

Muhammet Poyraz, Kazim Gorgulu, Zulkarneyn Sisman, Mahmud Yusuf Tanrikulu, Ali Kemal Okyay

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Optical Engineering, 56(3), 037106 (2017). https://doi.org/10.1117/1.OE.56.3.037106

Abstract

We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations.

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Muhammet Poyraz, Kazim Gorgulu, Zulkarneyn Sisman, Mahmud Yusuf Tanrikulu, and Ali Kemal Okyay "LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging," Optical Engineering 56(3), 037106 (15 March 2017). https://doi.org/10.1117/1.OE.56.3.037106

Received: 14 November 2016; Accepted: 2 March 2017; Published: 15 March 2017

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