Absolute measurement method for correction of low-spatial frequency surface figures of aspherics

Wei-Cheng Lin; Shenq-Tsong Chang; Cheng-Fang Ho; Ching-Hsiang Kuo; Chien-Kai Chung; Wei-Yao Hsu; Shih-Feng Tseng; Cheng-Kuo Sung

doi:10.1117/1.OE.56.5.055101

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27 May 2017 Absolute measurement method for correction of low-spatial frequency surface figures of aspherics

Wei-Cheng Lin, Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng, Cheng-Kuo Sung

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Optical Engineering, 56(5), 055101 (2017). https://doi.org/10.1117/1.OE.56.5.055101

Abstract

An absolute measurement method involving a computer-generated hologram to facilitate the identification of manufacturing form errors and mounting- and gravity-induced deformations of a 300-mm aspheric mirror is proposed. In this method, the frequency and magnitude of the curve graph plotted from each Zernike coefficient obtained by rotating the mirror with various orientations about optical axis were adopted to distinguish the nonrotationally symmetric aberration. In addition, the random ball test was used to calibrate the rotationally symmetric aberration (spherical aberration). The measured absolute surface figure revealed that a highly accurate aspheric surface with a peak-to-valley value of 1/8 wave at 632.8 nm was realized after the surface figure was corrected using the reconstructed error map.

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Wei-Cheng Lin, Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng, and Cheng-Kuo Sung "Absolute measurement method for correction of low-spatial frequency surface figures of aspherics," Optical Engineering 56(5), 055101 (27 May 2017). https://doi.org/10.1117/1.OE.56.5.055101

Received: 18 December 2016; Accepted: 9 May 2017; Published: 27 May 2017

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