Optical design and system characterization of an imaging microscope at 121.6 nm

Weichuan Gao; Emily Finan; Geon-Hee Kim; Youngsik Kim; Thomas D. Milster

doi:10.1117/1.OE.57.3.035101

9 March 2018 Optical design and system characterization of an imaging microscope at 121.6 nm

Weichuan Gao, Emily Finan, Geon-Hee Kim, Youngsik Kim, Thomas D. Milster

Author Affiliations +

Optical Engineering, Vol. 57, Issue 3, 035101 (March 2018). https://doi.org/10.1117/1.OE.57.3.035101

Abstract

We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

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Weichuan Gao, Emily Finan, Geon-Hee Kim, Youngsik Kim, and Thomas D. Milster "Optical design and system characterization of an imaging microscope at 121.6 nm," Optical Engineering 57(3), 035101 (9 March 2018). https://doi.org/10.1117/1.OE.57.3.035101

Received: 12 December 2017; Accepted: 15 February 2018; Published: 9 March 2018

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