9 April 2018 Scalable patterning using laser-induced shock waves
Author Affiliations +
Abstract
An advanced direct imprinting method with low cost, quick, and minimal environmental impact to create a thermally controllable surface pattern using the laser pulses is reported. Patterned microindents were generated on Ni50Ti50 shape memory alloys and aluminum using an Nd: YAG laser operating at 1064 nm combined with a suitable transparent overlay, a sacrificial layer of graphite, and copper grid. Laser pulses at different energy densities, which generate pressure pulses up to a few GPa on the surface, were focused through the confinement medium, ablating the copper grid to create plasma and transferring the grid pattern onto the surface. Scanning electron microscope and optical microscope images show that various patterns were obtained on the surface with high fidelity. One-dimensional profile analysis indicates that the depth of the patterned sample initially increases with the laser energy and later levels off. Our simulations of laser irradiation process also confirm that high temperature and high pressure could be generated when the laser energy density of 2  J/cm2 is used.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2018/$25.00 © 2018 SPIE
Saidjafarzoda Ilhom, Khomidkhodza Kholikov, Peizhen Li, Claire Ottman, Dylan Sanford, Zachary Thomas, Omer San, Haluk E. Karaca, and Ali O. Er "Scalable patterning using laser-induced shock waves," Optical Engineering 57(4), 041413 (9 April 2018). https://doi.org/10.1117/1.OE.57.4.041413
Received: 6 October 2017; Accepted: 13 March 2018; Published: 9 April 2018
Lens.org Logo
CITATIONS
Cited by 5 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Optical lithography

Shape memory alloys

Laser energy

Pulsed laser operation

Copper

Aluminum

Pulsed laser deposition

Back to Top