Passive aligned assembly of an integrated optical displacement sensor based on a reflective Mach–Zehnder interferometer with a 3 × 3 directional coupler

Johannes Kremmel; Nino Crameri; Tobias Lamprecht; Markus Michler

doi:10.1117/1.OE.57.8.087103

23 August 2018 Passive aligned assembly of an integrated optical displacement sensor based on a reflective Mach–Zehnder interferometer with a 3 × 3 directional coupler

Johannes Kremmel, Nino Crameri, Tobias Lamprecht, Markus Michler

Author Affiliations +

Optical Engineering, Vol. 57, Issue 8, 087103 (August 2018). https://doi.org/10.1117/1.OE.57.8.087103

Abstract

An integrated optical displacement sensor based on a reflective Mach–Zehnder interferometer (MZI) was developed. The sensor features a low-loss autocollimation measurement head fabricated using a 62.5-μm gradient index fiber as lens, which separates the incoming and reflected light. The mounting of the lenses and the fiber coupling were performed using a passive alignment assembly technology. Using a 3 × 3 directional coupler (DC), the direction of the phase shift can be resolved. The measurement head exhibits low losses compared to a conventional DC to separate the reflected light. A measurement range of 225 μm could be achieved in good agreement with the expected 230 μm. The results show a good agreement between simulation and measurements. Using basic measurement electronics, movements of 2 nm can be resolved, while a resolution of <1 nm is expected using optimized measurement equipment.

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Johannes Kremmel, Nino Crameri, Tobias Lamprecht, and Markus Michler "Passive aligned assembly of an integrated optical displacement sensor based on a reflective Mach–Zehnder interferometer with a 3 × 3 directional coupler," Optical Engineering 57(8), 087103 (23 August 2018). https://doi.org/10.1117/1.OE.57.8.087103

Received: 26 April 2018; Accepted: 8 August 2018; Published: 23 August 2018

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