11 March 2020 Improvement of rough surfaces height map reconstruction accuracy in tilt angle illumination digital holography
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Abstract

We present validation of a tilt angle illumination technique for height maps’ reconstruction using digital holography and propose a few solutions for improvement of the inclined probe wave front approach. The general algorithm of tilt angle digital holography approach is described and validated in experimental monitoring of a coin relief. Several approaches of height map quality improvement concerning tilt angle estimation, relation between measurement accuracy and dynamic range, and selective averaging algorithm are proposed and discussed.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2020/$28.00 © 2020 SPIE
Andrey V. Belashov and Nikolay V. Petrov "Improvement of rough surfaces height map reconstruction accuracy in tilt angle illumination digital holography," Optical Engineering 59(10), 102414 (11 March 2020). https://doi.org/10.1117/1.OE.59.10.102414
Received: 31 October 2019; Accepted: 24 February 2020; Published: 11 March 2020
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Digital holography

Reconstruction algorithms

Holograms

Error analysis

Photodetectors

Optical engineering

Phase shifting

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