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14 July 2020 Common path polarization phase-shifting interference microscope for surface profilometry
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Abstract

The development of a laser-based quantitative phase microscope with phase-shifting capability is reported. The proposed arrangement utilizes a suitably converging laser beam to illuminate the sample, a long working distance microscope objective, a wire grid polarizer to generate collinearly propagating and orthogonally polarized sample and reference beams, and polarizing devices for polarization phase shifting. Reorientation of a polarizer will revert the microscope back to a standard bright-field microscope that can be used for viewing the object under test.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2020/$28.00 © 2020 SPIE
Chandan Sengupta, Sanjukta Sarkar, and Kallol Bhattacharya "Common path polarization phase-shifting interference microscope for surface profilometry," Optical Engineering 59(7), 073102 (14 July 2020). https://doi.org/10.1117/1.OE.59.7.073102
Received: 30 March 2020; Accepted: 1 July 2020; Published: 14 July 2020
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