Open Access
18 October 2021 Modeling of coherence scanning interferometry using classical Fourier optics
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Abstract

We propose a model for coherence scanning interferometry using familiar Fourier optics methods and the spectrum of plane waves for the case where light source spectral bandwidth limits the fringe contrast as a function of optical path length. The model is straightforward to implement, is computationally efficient, and reveals many of the common error sources related to the optical filtering properties of the imaging system. We quantify the limits of applicability of the model related to the geometrical approximations for Fourier optics, particularly for high numerical apertures, and when using the fringe contrast for determining surface heights. These limitations can be overcome using a three-dimensional imaging model.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Peter J. de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, and Richard K. Leach "Modeling of coherence scanning interferometry using classical Fourier optics," Optical Engineering 60(10), 104106 (18 October 2021). https://doi.org/10.1117/1.OE.60.10.104106
Received: 26 August 2021; Accepted: 29 September 2021; Published: 18 October 2021
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
3D modeling

Interferometry

Fourier optics

Instrument modeling

Optical engineering

3D metrology

Light sources

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