22 February 2024 Design a common optical path system for near- and far-field detection of optical phased array chips
Yanhua Shen, Xingxin Fan, Zhiyu Chen, Jiawei Huang, Rongguo Lu, Guangbiao Wang, Zizheng Cao, Yong Liu
Author Affiliations +
Abstract

With the development of optical phased array (OPA) chips, it is urgent to design an optical system for detecting OPA chips. We propose a near- and far-field common optical path detection system adapted to commercial cameras. By changing the focal length of the rear set of lenses, the optical system can be used to realize the near-field detection, far-field field of view (FOV) detection, and far-field resolution detection of OPA chips. The object spatial resolution of the near-field system is 1.11 μm, and the far-field system can achieve ±45 deg FOV detection and 0.0185 deg angular resolution. Simulation results show that it can be used to characterize the far-field spot with 0.1 deg resolution. The optical system is designed with spherical lenses, and its imaging performance approaches the diffraction limit.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Yanhua Shen, Xingxin Fan, Zhiyu Chen, Jiawei Huang, Rongguo Lu, Guangbiao Wang, Zizheng Cao, and Yong Liu "Design a common optical path system for near- and far-field detection of optical phased array chips," Optical Engineering 63(2), 025106 (22 February 2024). https://doi.org/10.1117/1.OE.63.2.025106
Received: 10 November 2023; Accepted: 20 January 2024; Published: 22 February 2024
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KEYWORDS
Near field

Near field optics

Design

Optical design

Phased array optics

Imaging systems

Tolerancing

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