Dr. Ao Chen
Technical Marketing Manager at Mentor a Siemens Business
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Statistical analysis, Calibration, Control systems, Scanning electron microscopy, Process control, Semiconductor manufacturing, Process modeling

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Optical lithography, Image processing, Manufacturing, Adaptive optics, Neptune, Design for manufacturing, Extreme ultraviolet lithography, Source mask optimization, Critical dimension metrology, Design for manufacturability

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Calibration, Error analysis, Diffusion, 3D modeling, SRAF, Photoresist processing, Semiconducting wafers, Performance modeling, Process modeling, Photo decomposable quencher

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Calibration, Source mask optimization, Critical dimension metrology

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Etching, Line edge roughness, Photoresist processing, 193nm lithography

Showing 5 of 14 publications
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