Dr. Abraham Mario Tapilouw Profile

Dr. Abraham Mario Tapilouw

Senior Engineer at Industrial Technology Research Institute

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Publications (1)

Proceedings Article | 28 August 2016 Presentation + Paper

Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates (PSS) wafer

Abraham Mario Tapilouw, Yi-Wei Chang, Long-Yo Yu, Hau-Wei Wang

Proceedings Volume 9960, 996006 (2016) https://doi.org/10.1117/12.2236874

KEYWORDS: Optical interferometry, Optical testing, Patterned sapphire substrate, Semiconducting wafers, Light emitting diodes, Light sources, Interferometry, Halogens, Algorithm development, Bandpass filters

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