Agedi N. Boto
at Jet Propulsion Lab
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 May 2003 Paper
Proc. SPIE. 5111, Fluctuations and Noise in Photonics and Quantum Optics
KEYWORDS: Lithography, Diffraction, Genetic algorithms, Optical lithography, Photons, Interferometry, Photomasks, Geometrical optics, Entangled states, Quantum computing

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