Ahmad Ahmad
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Semiconductors, Actuators, Electron beams, Metrology, Inspection, Atomic force microscopy, Optical inspection, Photomasks, Charged particle optics, Chemical mechanical planarization

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Electron beams, Diamond, Metrology, Microscopy, Electron microscopes, Scanning probe lithography, Scanning electron microscopy, Atomic force microscope, Nanofabrication, Overlay metrology

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Actuators, Metrology, Digital signal processing, Imaging systems, Silicon, Inspection, Field programmable gate arrays, Atomic force microscopy, Photomasks, Semiconducting wafers

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Electron beam lithography, Etching, Silicon, Scanning probe lithography, Optical alignment, Reactive ion etching, Nanoelectronics, Cryogenics, Nanolithography

Proceedings Article | 31 January 2018 Paper
Proc. SPIE. 10456, Nanophotonics Australasia 2017
KEYWORDS: Lithography, Nanostructures, Optical lithography, Etching, Image resolution, Scanning probe lithography, Split ring resonators, Optics manufacturing, Cryogenics, Nanolithography

Showing 5 of 12 publications
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