Dr. Aibin Yu
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 February 2008 Paper
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Packaging, Gold, Metals, Interfaces, Indium, Diffusion, Silver, Solids, Semiconducting wafers, Wafer bonding

Proceedings Article | 8 February 2008 Paper
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Mirrors, Interfaces, Silver, Finite element methods, Micromirrors, Semiconducting wafers, Wafer bonding

Proceedings Article | 1 February 2008 Paper
Proc. SPIE. 6900, Quantum Sensing and Nanophotonic Devices V
KEYWORDS: Reflectors, Refractive index, Finite-difference time-domain method, Resonators, Waveguides, Sensors, Silicon, Bridges, Nanophotonics, Nanoelectromechanical systems

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