Dr. Ajit Paranjpe
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 5 March 2021 Presentation
Proc. SPIE. 11706, Light-Emitting Devices, Materials, and Applications XXV
KEYWORDS: Three dimensional sensing, Gallium arsenide, Silicon, Telecommunications, Sapphire, Photonics, Vertical cavity surface emitting lasers, Metalorganic chemical vapor deposition, Semiconducting wafers, Yield improvement

Proceedings Article | 9 March 2020 Presentation
Proc. SPIE. 11300, Vertical-Cavity Surface-Emitting Lasers XXIV
KEYWORDS: Photonic devices, Light emitting diodes, Three dimensional sensing, LIDAR, Laser applications, Photonics, Optical communications, Vertical cavity surface emitting lasers, Metalorganic chemical vapor deposition, LED displays

Proceedings Article | 19 August 2005 Paper
Proc. SPIE. 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
KEYWORDS: Amorphous silicon, Oxides, Reticles, Metrology, Data modeling, Calibration, Scatterometry, Finite element methods, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 10 May 2005 Paper
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Metrology, Data modeling, Dispersion, Spectroscopy, Germanium, Silicon, Optical metrology, Reflectometry, Spectrophotometry, Semiconducting wafers

Proceedings Article | 16 April 1993 Paper
Proc. SPIE. 1803, Advanced Techniques for Integrated Circuit Processing II
KEYWORDS: Optical lithography, Etching, Dry etching, Ions, Control systems, Antennas, Photoresist processing, Semiconducting wafers, Plasma, Anisotropy

Showing 5 of 7 publications
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