Dr. Akihiko Kono Profile

Dr. Akihiko Kono

at Kanazawa Institute of Technology

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Publications (1)

Proceedings Article | 17 March 2012 Paper

Removal of SU-8 resists using hydrogen radicals generated by tungsten hot-wire catalyzer

Akihiko Kono, Yu Arai, Yousuke Goto, Hideo Horibe

Proceedings Volume 8328, 83280R (2012) https://doi.org/10.1117/12.916033

KEYWORDS: Hydrogen, Silicon, Tungsten, Microelectromechanical systems, Manufacturing, Temperature metrology, Epoxies, Coating, Plating, Polymethylmethacrylate

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