Dr. Akiko Hirai
Researcher at National Institute of Advanced Industrial Science and Technology
SPIE Involvement:
Author
Publications (20)

SPIE Journal Paper | 23 October 2020
JM3 Vol. 19 Issue 04

SPIE Journal Paper | 23 March 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Clouds, Scanning electron microscopy, Atomic force microscope, Servomechanisms, 3D metrology, Transmission electron microscopy, Semiconductors

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Lithography, Metrology, Error analysis, Atomic force microscopy, Scanning electron microscopy, 3D metrology, Spatial resolution, Line edge roughness, Edge roughness, 3D image processing

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Semiconductors, Lithography, Metrology, Surface roughness, Atomic force microscopy, Scanning electron microscopy, 3D metrology, Dimensional metrology, Critical dimension metrology, Line edge roughness

Proceedings Article | 7 June 2013 Paper
Proc. SPIE. 8883, ICPS 2013: International Conference on Photonics Solutions
KEYWORDS: Holograms, Interferometers, Spectroscopy, Interferometry, Heterodyning, Signal processing, Image retrieval, Imaging spectrometry, Bragg cells, 3D image processing

Showing 5 of 20 publications
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