Ms. Akiko Kawamoto Profile

Akiko Kawamoto

at Toshiba Corp

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Author

Publications (3)

Proceedings Article | 10 April 2013 Paper

Hybrid approach to optical CD metrology of directed self-assembly lithography

Stephane Godny, Masafumi Asano, Akiko Kawamoto, Koichi Wakamoto, Kazuto Matsuki, Cornel Bozdog, Matthew Sendelbach, Igor Turovets, Ronen Urenski, Renan Milo

Proceedings Volume 8681, 86812D (2013) https://doi.org/10.1117/12.2012660

KEYWORDS: Metrology, Critical dimension metrology, Scanning transmission electron microscopy, Semiconducting wafers, Lithography, Polymers, Process control, Chemical elements, Geometrical optics, Directed self assembly

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Proceedings Article | 10 April 2013 Paper

Application of optical CD metrology for alternative lithography

Masafumi Asano, Akiko Kawamoto, Kazuto Matsuki, Stephane Godny , Tingsheng Lin, Koichi Wakamoto

Proceedings Volume 8681, 86812C (2013) https://doi.org/10.1117/12.2010887

KEYWORDS: Nanoimprint lithography, Lithography, Metrology, Critical dimension metrology, Etching, 3D metrology, Coating, Process control, Transmission electron microscopy, Directed self assembly

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Proceedings Article | 24 March 2009 Paper

Hotspot monitoring system with contour-based metrology

A. Kawamoto, Y. Tanaka, S. Tsuda, K. Shibayama, S. Furukawa, H. Abe, T. Mitsui, Y. Yamazaki

Proceedings Volume 7272, 72721F (2009) https://doi.org/10.1117/12.814022

KEYWORDS: Inspection, Metrology, Lithography, Critical dimension metrology, Manufacturing, Visualization, Image acquisition, Semiconducting wafers, Process control, Image processing

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