Dr. Alan E. Rosenbluth
at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (27)

SPIE Journal Paper | 28 April 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Calibration, Data modeling, Process modeling, Autoregressive models, Lithography, Photomasks, Statistical modeling, Monte Carlo methods, Photoresist processing, Optical proximity correction

Proceedings Article | 30 March 2017 Presentation + Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Optical proximity correction, Convolution, Computing systems, Complex systems, Image acquisition, Coherence imaging, Imaging systems, Computational lithography, Photomasks, Error analysis, Modulation, Systems modeling, Image processing, Spatial frequencies

SPIE Journal Paper | 27 June 2014
JM3 Vol. 13 Issue 02
KEYWORDS: Photomasks, Phase shifts, SRAF, Semiconducting wafers, Lithography, Opacity, Optical lithography, Scattering, Binary data, Polarization

Proceedings Article | 5 April 2011 Paper
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Source mask optimization, Photomasks, Lithography, Standards development, Algorithm development, Resolution enhancement technologies, Diffraction, Visualization, Photovoltaics

Proceedings Article | 23 March 2011 Paper
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Source mask optimization, Photomasks, Resolution enhancement technologies, Optical proximity correction, Tolerancing, Optical lithography, SRAF, Image processing, Lithography, Semiconducting wafers

Showing 5 of 27 publications
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