Dr. Albert K. Henning
Principal at Aquarian Microsystems
SPIE Involvement:
Conference Program Committee | Author
Publications (16)

Proceedings Article | 9 March 2013 Paper
Proc. SPIE. 8615, Microfluidics, BioMEMS, and Medical Microsystems XI
KEYWORDS: Oxides, Microfluidics, Proteins, Capillaries, Silicon, Scanning probe lithography, Throat, Printing, Microfabrication, Liquids

Proceedings Article | 9 March 2013 Paper
Proc. SPIE. 8615, Microfluidics, BioMEMS, and Medical Microsystems XI
KEYWORDS: Oxides, Sensors, Etching, Silicon, Scanning probe lithography, Boron, Microfabrication, Resistors, Semiconducting wafers, Wafer bonding

Proceedings Article | 12 February 2008 Paper
Proc. SPIE. 6886, Microfluidics, BioMEMS, and Medical Microsystems VI
KEYWORDS: Microfluidics, Amplifiers, Energy harvesting, Data processing, Field effect transistors, Logic devices, Analog electronics, Digital electronics, Standards development, Protactinium

Proceedings Article | 22 January 2007 Paper
Proc. SPIE. 6465, Microfluidics, BioMEMS, and Medical Microsystems V
KEYWORDS: Mathematical modeling, Microfluidics, Logic, Oscillators, Switching, Gases, Field effect transistors, Logic devices, Liquids, Protactinium

Proceedings Article | 19 January 2007 Paper
Proc. SPIE. 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
KEYWORDS: Actuators, Microfluidics, Microsystems, Silicon, Gases, Reliability, Cavitation, Thermodynamics, Temperature metrology, Liquids

Showing 5 of 16 publications
Proceedings Volume Editor (5)

SPIE Conference Volume | 8 February 2007

SPIE Conference Volume | 21 January 2006

SPIE Conference Volume | 22 January 2005

SPIE Conference Volume | 24 January 2004

Conference Committee Involvement (36)
Microfluidics, BioMEMS, and Medical Microsystems XX
22 January 2022 | San Francisco, California, United States
Microfluidics, BioMEMS, and Medical Microsystems XIX
6 March 2021 | Online Only, California, United States
Microfluidics, BioMEMS, and Medical Microsystems XVIII
1 February 2020 | San Francisco, California, United States
Microfluidics, BioMEMS, and Medical Microsystems XVII
2 February 2019 | San Francisco, California, United States
Microfluidics, BioMEMS, and Medical Microsystems XVI
27 January 2018 | San Francisco, California, United States
Showing 5 of 36 Conference Committees
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