Alberto D. Dioses
at EMD Performance Materials Corp
SPIE Involvement:
Publications (9)

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Metals, Etching, Oxides, Photomasks, Dielectrics, Resistance, Semiconducting wafers, Coating, Silicon, Plasma etching

Proceedings Article | 27 March 2014 Paper
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Etching, Resistance, Metals, Chemical vapor deposition, Semiconducting wafers, Silicon, Wet etching, Atomic layer deposition, Oxides, Semiconductor manufacturing

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Etching, Metals, Semiconducting wafers, Photomasks, Silicon, Coating, Oxides, Extreme ultraviolet lithography, Lithography, Photoresist materials

Proceedings Article | 31 March 2010 Paper
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Fourier transforms, Lithography, Silicon, Plasma etching, Plasma, Coating, Polymers, Bottom antireflective coatings, Etching, 193nm lithography

Proceedings Article | 11 December 2009 Paper
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Fourier transforms, Polymers, Lithography, Bottom antireflective coatings, Plasma etching, Plasma, Etching, Silicon, Semiconducting wafers, Scanning electron microscopy

Showing 5 of 9 publications
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