Dr. Aleksander Yu. Vinokhodov
Chief Research Scientist at TRINITI
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 12 April 2007 Paper
Proc. SPIE. 6611, Laser Optics 2006: High-Power Gas Lasers
KEYWORDS: Lithography, Electrodes, Ions, Manufacturing, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Liquids, Tin

Proceedings Article | 16 June 2004 Paper
Proc. SPIE. 5479, Laser Optics 2003: High-Power Gas Lasers
KEYWORDS: Lithography, Mirrors, Ultraviolet radiation, High power lasers, Xenon, Gas lasers, Extreme ultraviolet, Excimer lasers, Pulsed laser operation, Plasma

Proceedings Article | 6 October 2003 Paper
Proc. SPIE. 5137, International Conference on Lasers, Applications, and Technologies 2002: Advanced Lasers and Systems
KEYWORDS: Electrodes, Ultraviolet radiation, High power lasers, Crystals, Laser applications, Laser development, Transistors, Excimer lasers, Laser crystals, Pulsed laser operation

Proceedings Article | 1 July 2002 Paper
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Lithography, Optical filters, Calibration, Xenon, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma generation, Plasma, Liquids

Proceedings Article | 1 July 2002 Paper
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Lithography, Mirrors, Spectrographs, Visible radiation, Metrology, Calibration, Spectral resolution, Extreme ultraviolet, Coded apertures, Plasma

Showing 5 of 11 publications
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