Dr. Alena Andryzhyieuskaya Profile

Dr. Alena Andryzhyieuskaya

System Engineer at ASML Netherlands BV

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Publications (2)

Proceedings Article | 22 September 2011 Paper

High-range laser bandwidth tuning for focus drilling

Alena Andryzhyieuskaya, Michiel Kupers, John van Keulen, Tom van der Hoeff, Pablo Gabolde, Jeroen J. H. Linders, Bart Smits, Hiroshi Tanaka, Junichi Fujimoto, Satoshi Tanaka, Takahito Kumazaki

Proceedings Volume 8167, 81671X (2011) https://doi.org/10.1117/12.898556

KEYWORDS: Semiconducting wafers, Laser drilling, Lithography, Fabry–Perot interferometers, Overlay metrology, Optical lithography, Extreme ultraviolet, Laser stabilization, Light sources, Scanners

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Proceedings Article | 23 March 2011 Paper

Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner

Alena Andryzhyieuskaya, Frank Staals, Thijs Hollink, Marcel Beems, Rob Willekers, Jan Mulkens, Peter Engblom, Angelique Nachtwein, Toralf Gruner, Hans Bakker, Jo Finders, Youping Zhang

Proceedings Volume 7973, 79731G (2011) https://doi.org/10.1117/12.880759

KEYWORDS: Wavefronts, Photomasks, Scanners, Source mask optimization, Optimization (mathematics), Semiconducting wafers, 3D acquisition, Reticles, Computational lithography, 3D image processing

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