Mr. Alex Cheng Profile

Alex Cheng

at KLA-Tencor Taiwan

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

In device overlay control with multiple overlay metrology in 3D-NAND process

Li-Ting Chang, Yu-Lin Liu, Chi-hao Huang, Rishabh Kushwaha, Yen Chun Chuan Sun, Cheng Hung Wu, Shao Chang Cheng, Hsiao Fei Su, Yen Hung Liu, Mars Yang, Elvis Yang, T. H. Yang, K. C. Chen

Proceedings Volume 12053, 120531P (2022) https://doi.org/10.1117/12.2613193

KEYWORDS: Overlay metrology, Single crystal X-ray diffraction, Metrology, Semiconducting wafers, 3D metrology, Control systems, Process modeling, Polishing, Etching, Image processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years