Dr. Alexander Efremov
at State Univ of Chemistry and Technology
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 30 December 2016 Paper
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Etching, Argon, Chemical species, Dry etching, Polymers, Ions, Oxygen, Carbon monoxide, Autoregressive models, Plasma

Proceedings Article | 30 December 2016 Paper
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Etching, Argon, Chemical species, Dry etching, Molecules, Ions, Plasmas, Chemistry, Carbon monoxide, Autoregressive models

Proceedings Article | 8 January 2013 Paper
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Argon, Chemical species, Ions, Gases, Diffusion, Oxygen, Ionization, Chlorine, Plasma, Protactinium

SPIE Journal Paper | 1 April 2009
JM3 Vol. 8 Issue 02
KEYWORDS: Chlorine, Argon, Etching, Plasma, Ions, Autoregressive models, Vanadium, Plasma etching, Chemical species, Sputter deposition

Proceedings Article | 10 June 2006 Paper
Proc. SPIE. 6260, Micro- and Nanoelectronics 2005
KEYWORDS: Chemical species, Particles, Molecules, Ions, Diffusion, Ionization, Human-computer interaction, Chlorine, Plasma, Protactinium

Showing 5 of 7 publications
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