Dr. Alexander Konchenko Profile

Dr. Alexander Konchenko

SPIE Involvement:

Author

Publications (1)

SPIE Journal Paper | 26 April 2013

Etch depth mapping of phase binary computer-generated holograms by means of specular spectroscopic scatterometry

Victor Korolkov, Alexander Konchenko, Vadim Cherkashin, Nikolay Mironnikov, Alexander Poleshchyk

OE, Vol. 52, Issue 09, 091722, (April 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.9.091722

KEYWORDS: Etching, Binary data, Reflection, Spectrometers, Computer generated holography, Diffraction, Scatterometry, Diffraction gratings, Spectroscopy, Holograms

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years